Guide to Hands-on MEMS Design and Prototyping - Kubby, Joel A. (University of California, Santa Cruz)

Get the hands-on experience needed to design, fabricate and test MEMS devices with this practical guide. You will also learn to use foundry multi-project fabrication processes for low-cost MEMS projects, and end-of-chapter exercises and design challenges are provided, making this ideally suited for use in the classroom and by practising engineers.