Handbook of Chemicals and Gases for the Semiconductor Industry - Misra, Ashutosh (Air Liquide Electronics, Inc) a Hogan, Jeremiah D. (exas Instruments, Inc) a Chorush, Russell A. (Conley, Rose and Tayon, PC)

This book brings together the most useful and important data on chemicals and gases used in the manufacture of semiconductor devices. It offers an A-to-Z listing of physical properties and safety information for more than 270 chemicals and gases used in the manufacture of semiconductor chips.