Microsensors, MEMS, and Smart Devices - Gardner, Julian W. (University of Warwick, UK) a Varadan, Vijay K. (Pennsylvania State University, USA) a Awadelkarim, Osama O. (Pennsylvania State University, USA)

From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non--electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced.