Multi-Wafer Rotating MEMS Machines

Name: Multi-Wafer Rotating MEMS Machines
Brand: Springer-Verlag New York Inc.

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Nejnižší cena od 10. 9. 2026: 3 819 Kč.

3 859 Kč

Springer-Verlag New York Inc.

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Describes the collaboration and research that was developed to produce the MIT Gas Turbine Engine. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. This book discusses the technical details that have gone into producing the engine and the overall systems-level.

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