Radio-Frequency Capacitive Discharges - Raizer, Yuri P. a Shneider, Mikhail N. a Yatsenko, Nikolai A.

Describes radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. This work provides a treatment of the physics underlying rf discharges, techniques for generating such discharges, experimental methods and measurement techniques, and research results.