Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set - Madou, Marc J. (University of California, Irvine, USA)

Offers a complete MEMS and NEMS reference. Discussing a variety of approaches, this title includes developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. It also provides both classroom and self-learners with worked-out example problems.