Spectroscopic Ellipsometry and Reflectometry - Tompkins, Harland G. (Motorola, Inc.) a McGahan, William A. (Nanometrics, Inc.)

Name: Spectroscopic Ellipsometry and Reflectometry - Tompkins, Harland G. (Motorola, Inc.) a McGahan, William A. (Nanometrics, Inc.)
Brand: John Wiley & Sons Inc

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While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry.

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